Date of Award

Spring 2017

Document Type


Degree Name

Master of Science (MS)


Electrical & Computer Engineering

Committee Director

Sylvain Marsillac

Committee Member

Christian Zemlin

Committee Member

Chung Hao Chen


With the depletion of non-renewable energy sources owing to increasing demands, we need to develop renewable energy sources, which can replace them with cleaner energy sources. The solar industry is one of these renewable energies. In spite of having very high potential, harvesting solar energy has been a challenge due to the cost of solar cells. Silicon dominates the photovoltaic industry, but even this technology can accommodate great improvements. This can be done notably by finding low cost deposition techniques for the silicon. The main aim of this thesis is to form high-quality nanocrystalline silicon thin films with the help of sputtering and ion beam deposition. Various characterization techniques were used to analyze the samples and demonstrate that ion beams indeed assist in obtaining higher quality nanocrystalline thin films


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