Document Type
Article
Publication Date
2008
DOI
10.1063/1.3041493
Publication Title
Journal of Applied Physics
Volume
104
Issue
12
Pages
124302 (1-5)
Abstract
The effects of laser-induced electronic excitations on the self-assembly of Ge quantum dots on Si (100) - (2×1) grown by pulsed laser deposition are studied. Electronic excitations due to laser irradiation of the Si substrate and the Ge film during growth are shown to decrease the roughness of films grown at a substrate temperature of ∼120 °C. At this temperature, the grown films are nonepitaxial. Electronic excitation results in the formation of an epitaxial wetting layer and crystalline Ge quantum dots at ∼260 °C, a temperature at which no crystalline quantum dots form without excitation under the same deposition conditions.© 2008 American Institute of Physics. [DOI: 10.1063/1.3041493]
Original Publication Citation
Hegazy, M. S., & Elsayed-Ali, H. E. (2008). Nonthermal laser-induced formation of crystalline Ge quantum dots on Si(100). Journal of Applied Physics, 104(12), 124302. doi:10.1063/1.3041493
Repository Citation
Hegazy, M. S. and Elsayed-Ali, H. E., "Nonthermal Laser-Induced Formation of Crystalline Ge Quantum Dots on Si(100)" (2008). Electrical & Computer Engineering Faculty Publications. 100.
https://digitalcommons.odu.edu/ece_fac_pubs/100
Included in
Atomic, Molecular and Optical Physics Commons, Electronic Devices and Semiconductor Manufacturing Commons, Quantum Physics Commons, Semiconductor and Optical Materials Commons