Proceedings of the Applied Diamond Conference 1995- Applications of Diamond Films and Related Materials: Third International Conference
Applications of Diamond Films and Related Materials: Third International Conference, National Institute of Standards and Technology, Gaithersburg, MD, August 21-24, 1995
We present the results of theoretical modeling and experimental testing of a diamond thin film sensor for flow studies. It is shown that the high thermal conductivity of a diamond film can enhance the frequency response of the flow sensor. One-dimensional heat diffusion equation was solved using the finite difference method for determining the frequency response. Two different sensor structures were analyzed: a Ni film on a quartz substrate (Ni/Q) and an intermediate layer of diamond film between the Ni film and quartz substrate (Ni/D/Q). The theoretical model predicts a frequency response for the Ni/D/Q sensor higher than that of the Ni/Q sensor. Diamond films for the Ni/D/Q sensor were deposited onto the quartz substrate by microwave plasma-enhanced chemical vapor deposition (MPECVD). The conditions for a high nucleation density were established for obtaining a continuous diamond thin film. A subsequent nickel film patterned and deposited serves as the sensing arm in the bridge circuit of an anemometer. The measured frequency response of the Ni/D/Q sensor combination is greater than 220 kHz, as compared to the Ni/Quartz sensor response of 120 kHz.
Original Publication Citation
Albin, S., Hagwood, J. C., Cooper, J. B., Gray, D. L., Martinson, S. D., & Scott, M. A. (1995). A Diamond Thin Film Flow Sensor. Paper presented at the Applications of Diamond Films and Related Materials: Third International Conference, National Institute of Standards and Technology, Gaithersburg, Maryland, August 21-24.
Albin, Sacharia; Hagwood, John C.; Cooper, John B.; Gray, David L.; Martinson, Scott D.; and Scott, Michael A., "A Diamond Thin Film Flow Sensor" (1995). Electrical & Computer Engineering Faculty Publications. 214.