Deposition of Nb₃Sn Films by Multilayer Sequential Sputtering for SRF Cavity Application

Authors

Md. N. Sayeed, Old Dominion UniversityFollow
Hani E. Elsayed-Ali, Old Dominion UniversityFollow
U. Pudasaini
G.V. Eremeev
C.E. Reece
M. Burton
A.M. Valente-Feliciano

Document Type

Conference Paper

Publication Date

7-1-2019

DOI

10.18429/JACoW-SRF2019-TUP079

Publication Title

Proceedings of the 19th International Conference on RF Superconductivity

Pages

639- 643

Conference Name

19th International Conference on RF Superconductivity (SRF'19), Dresden Germany, 30 June-05 July 2019

Abstract

Nb₃Sn is considered as an alternative of Nb for SRF accelerator cavity application due to its potential to obtain higher quality factors and higher accelerating gradients at a higher operating temperature. Magnetron sputtering is one of the effective techniques that can be used to fabricate Nb₃Sn on SRF cavity surface. We report on the surface properties of Nb₃Sn films fabricated by sputtering multiple layers of Nb and Sn on sapphire and niobium substrates followed by annealing at 950°C for 3 h. The crystal structure, film microstructure, composition and surface roughness were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), energy dispersive X-ray spectroscopy (EDS), and atomic force microscopy (AFM). The RF performance of the Nb₃Sn coated Nb substrates were measured by a surface impedance characterization system. We also report on the design of a multilayer sputter deposition system to coat a single-cell SRF cavity.

Comments

Open access under the terms of the Creative Commons Attribution license (CC By 3.0 U.S.).

Original Publication Citation

Sayeed, M., Burton, M., Elsayed-Ali, H., Eremeev, G., Pudasaini, U., Reece, C., & Valente-Feliciano, A. M. (2019). Deposition of Nb₃Sn films by multilayer sequential sputtering for SRF cavity application. Proceedings of the 19th International Conference on RF Superconductivity (SRF'19), 637-641. JACOW Publishing, Geneva, Switzerland. 10.18429/JACoW-SRF2019-TUP079

Repository Citation

Sayeed, Md. N.; Elsayed-Ali, Hani E.; Pudasaini, U.; Eremeev, G.V.; Reece, C.E.; Burton, M.; and Valente-Feliciano, A.M., "Deposition of Nb₃Sn Films by Multilayer Sequential Sputtering for SRF Cavity Application" (2019). Electrical & Computer Engineering Faculty Publications. 234.
https://digitalcommons.odu.edu/ece_fac_pubs/234