Document Type

Conference Paper

Publication Date




Publication Title

Proceedings of the 5th North American Particle Accelerator Conference



Conference Name

NAPAC 2022, 7-12 August, 2022, Albuquerque, New Mexico


Nb₃Sn is of interest as a coating for SRF cavities due to its higher transition temperature Tc ~18.3 K and superheating field Hsh ~400 mT, both are twice that of Nb. Nb₃Sn coated cavities can achieve high-quality factors at 4 K and can replace the bulk Nb cavities operated at 2 K. A cylindrical magnetron sputtering system was built, commissioned, and used to deposit Nb₃Sn on the inner surface of a 2.6 GHz single-cell Nb cavity. With two identical cylindrical magnetrons, this system can coat a cavity with high symmetry and uniform thickness. Using Nb-Sn multilayer sequential sputtering followed by annealing at 950°C for 3 hours, polycrystalline Nb₃Sn films were first deposited at the equivalent positions of the cavity’s beam tubes and equator. The film’s composition, crystal structure, and morphology were characterized by energy dispersive spectroscopy, X-ray diffraction, and atomic force microscopy. The Tc of the films was measured by the four-point probe method and was 17.61 to 17.76 K. Based on these studies, ~1.2 micron thick Nb₃Sn was deposited inside a 2.6 GHz Nb cavity. We will discuss first results from samples and cavity coatings, and the status of the coating system.


© 2022 The Authors.

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Original Publication Citation

Shakel, M. S., Cao, W., Elsayed-Ali, H., Ermeev, G. V., Pudasaini, U., Sayeed, M. N., & Valente-Feliciano, A.-M. (2022). Nb3Sn coating of a 2.6 GHz SRF Cavity by Sputter Deposition Technique. In S. Biedron, E. Simakov, S. Milton, P. Anisimov, & V.R.W. Schaa (Eds.), Proceedings of the 5th North American Particle Accelerator Conference.