Document Type

Conference Paper

Publication Date




Publication Title

Proceedings of the 9th International Particle Accelerator Conference




Nb3Sn is a potential candidate for surface material of SRF cavities since it can enable the cavity to operate at higher temperatures with high quality factor and at an increased accelerating gradient. Nb-Sn films were deposited using magnetron sputtering of individual Nb and Sn targets onto Nb and sapphire substrates. The as-deposited films were annealed at 1200 °C for 3 hours. The films were characterized for their structure by X-ray Diffraction (XRD), morphology by Field Emission Scanning Electron Microscopy (FESEM), and composition by Energy Dispersive X-ray Spectroscopy (EDS) and Time of Flight Secondary Ion Mass Spectrometry (ToF-SIMS). The surface resistivity was measured down to cryogenic temperature to determine the superconducting transition temperature and its width. The composition of the multilayered films was controlled by varying the thickness of the Nb and Sn layers. The films showed crystalline Nb3Sn phases with Tc up to 17.6 K.


Copyright © 2018 by JACoW

Published under a Creative Commons Attribution 3.0 Unported (CC BY 3.0) License.

Original Publication Citation

Sayeed, M.N.S., Elsayed-Ali, H. Eremeev, G. V., Kelley, M. J., Pudasaini, U, & Reece, C. E. (2018). Magnetron sputtering of Nb3Sn for SRF cavities. In S. Koscielniak, T. Satogata, V.R.W. Schaa, & J. Thomson (Eds.), Proceedings of the 9th International Particle Accelerator Conference (3946-3949). JACoW.


0000-0002-1329-5018 (Elsayed-Ali)