Date of Award
Master of Science (MS)
Zhili Julie Hao
Colin P. Britcher
This thesis presents a z-axis MEMS gyroscope with a symmetric mechanical structure. The multiple-mass design prioritizes the sense-mode Quality Factor (Q) and thus improves its scale factor. The proposed mechanically coupled, dynamically balanced anti-phase sense-mode design minimizes energy dissipation through the substrate in order to maximize the Q. Numerical simulation is implemented in a finite element analysis software, COMSOL, to identify the two operation modes of the gyroscope: drive-mode and sense-mode. The multiple-mass gyroscope design is further fabricated using a one-mask process. Experimental characterization of frequency response in both drive-mode and sense-mode of the device are conducted, proving the design concept for improving the Q in the sense-mode.
"Design and Implementation of a Z-Axis MEMS Gyroscope with a Symmetric Multiple-Mass Mechanical Structure"
(2012). Master of Science (MS), thesis, Mechanical Engineering, Old Dominion University, DOI: 10.25777/f5vj-gk54