Date of Award

Spring 2012

Document Type

Thesis

Degree Name

Master of Science (MS)

Department

Mechanical Engineering

Committee Director

Zhili Julie Hao

Committee Member

Han Bao

Committee Member

Colin P. Britcher

Abstract

This thesis presents a z-axis MEMS gyroscope with a symmetric mechanical structure. The multiple-mass design prioritizes the sense-mode Quality Factor (Q) and thus improves its scale factor. The proposed mechanically coupled, dynamically balanced anti-phase sense-mode design minimizes energy dissipation through the substrate in order to maximize the Q. Numerical simulation is implemented in a finite element analysis software, COMSOL, to identify the two operation modes of the gyroscope: drive-mode and sense-mode. The multiple-mass gyroscope design is further fabricated using a one-mask process. Experimental characterization of frequency response in both drive-mode and sense-mode of the device are conducted, proving the design concept for improving the Q in the sense-mode.

DOI

10.25777/f5vj-gk54

ISBN

9781267647689

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