Date of Award
Fall 1999
Document Type
Thesis
Degree Name
Master of Science (MS)
Department
Mechanical & Aerospace Engineering
Program/Concentration
Aerospace Engineering
Committee Director
Robert ash
Committee Member
Colin Britcher
Committee Member
Thomas Alberts
Call Number for Print
Special Collections; LD4331.E535 A48
Abstract
A new mass flow controller has been designed which responds very rapidly to changes in control settings. The design was evolved after carefully studying the internal flow and the sources for thermal lag and other non-linear behavior. After discussing an overview of the basic mass flow controller operating principles, data will be presented which characterize the basic building blocks of an advanced flow sensor design. Subsequently, a flow model and control strategy have been developed and tested which reduce response lag significantly. Results of the new design, obtained experimentally under various transient conditions, will be discussed.
Rights
In Copyright. URI: http://rightsstatements.org/vocab/InC/1.0/ This Item is protected by copyright and/or related rights. You are free to use this Item in any way that is permitted by the copyright and related rights legislation that applies to your use. For other uses you need to obtain permission from the rights-holder(s).
DOI
10.25777/jeay-vy33
Recommended Citation
Alvesteffer, William J..
"An Improved Thermal Mass Flow Controller for Hazardous and Precision Applications"
(1999). Master of Science (MS), Thesis, Mechanical & Aerospace Engineering, Old Dominion University, DOI: 10.25777/jeay-vy33
https://digitalcommons.odu.edu/mae_etds/418