Date of Award

Fall 1999

Document Type

Thesis

Degree Name

Master of Science (MS)

Department

Mechanical & Aerospace Engineering

Program/Concentration

Aerospace Engineering

Committee Director

Robert ash

Committee Member

Colin Britcher

Committee Member

Thomas Alberts

Call Number for Print

Special Collections; LD4331.E535 A48

Abstract

A new mass flow controller has been designed which responds very rapidly to changes in control settings. The design was evolved after carefully studying the internal flow and the sources for thermal lag and other non-linear behavior. After discussing an overview of the basic mass flow controller operating principles, data will be presented which characterize the basic building blocks of an advanced flow sensor design. Subsequently, a flow model and control strategy have been developed and tested which reduce response lag significantly. Results of the new design, obtained experimentally under various transient conditions, will be discussed.

Rights

In Copyright. URI: http://rightsstatements.org/vocab/InC/1.0/ This Item is protected by copyright and/or related rights. You are free to use this Item in any way that is permitted by the copyright and related rights legislation that applies to your use. For other uses you need to obtain permission from the rights-holder(s).

DOI

10.25777/jeay-vy33

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