Document Type

Article

Publication Date

2025

DOI

10.1116/6.0004446

Publication Title

Journal of Vacuum Science and Technology B

Volume

43

Issue

3

Pages

034203 (1-18)

Abstract

The hydrogen outgassing rate of a vacuum chamber made of AISI 1020 low-carbon steel was found to be notably smaller than a similar chamber made of AISI 316L stainless steel following heat treatment at 150 degrees C. When the chambers were baked at 400 degrees C, the outgassing rate of the 1020 low-carbon steel chamber was approximately 2000 times smaller than that of the 316L stainless-steel chamber. After quantifying hydrogen outgassing rates, vacuum chambers made of 1020 low-carbon steel and 316L stainless steel were heated for a prescribed duration and then pumped with an ion pump and nonevaporable getter pump to reach "ultimate pressure." The 1020 low-carbon steel chamber reached lower pressures than the 316L stainless-steel chamber. Monte Carlo simulation predictions using the measured hydrogen outgassing rates are in good agreement with the ultimate pressure measurements. Our measurements indicate that low-carbon steel can provide pressures within the extreme high vacuum range (< 7.5 x 10(-¹³)Torr) if care is taken to minimize the surface area contribution from stainless steel.

Rights

© Copyright 2025 AIP Publishing LLC. All rights reserved.

This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in

Al-Allaq, A. H., Mamun, M. A., Poelker, M., & Elmustafa, A. (2025). Side-by-side evaluation of the outgassing rate and ultimate pressure achieved inside tubes made of low-carbon and stainless steel. Journal of Vacuum Science and Technology B, 43(3), 1-18, Article 034203.

and may be found at https://doi.org/10.1116/6.0004446.

Data Availability

Article states: "The data that support the findings of this study are available from the corresponding author upon reasonable request."

Original Publication Citation

Al-Allaq, A. H., Mamun, M. A., Poelker, M., & Elmustafa, A. (2025). Side-by-side evaluation of the outgassing rate and ultimate pressure achieved inside tubes made of low-carbon and stainless steel. Journal of Vacuum Science and Technology B, 43(3), 1-18, Article 034203. https://doi.org/10.1116/6.0004446

ORCID

0000-0002-0415-2795 (Al-Allaq), 0000-0001-5865-6035 (Elmustafa)

Available for download on Wednesday, April 29, 2026

Share

COinS