Date of Award
Summer 2013
Document Type
Dissertation
Degree Name
Doctor of Philosophy (PhD)
Department
Physics
Committee Director
Leposava Vuskovic
Committee Member
Charles I. Sukenik
Committee Member
Gail Dodge
Committee Member
Alexander Godunov
Committee Member
Mileta Tomovic
Abstract
We have developed several diagnostic techniques to characterize two types of microwave (MW) discharge plasmas: a supersonic flowing argon MW discharge maintained in a cylindrical quartz cavity at frequency ƒ = 2.45 GHz and a pulse repetitive MW discharge in air at ƒ = 9.5 GHz. Low temperature MW discharges have been proven to posses attractive properties for plasma cleaning and etching of niobium surfaces of superconductive radio frequency (SRF) cavities. Plasma based surface modification technologies offer a promising alternative for etching and cleaning of SRF cavities. These technologies are low cost, environmentally friendly and easily controllable, and present a possible alternative to currently used acid based wet technologies, such as buffered chemical polishing (BCP), or electrochemical polishing (EP). In fact, weakly ionized. non-equilibrium, and low temperature gas discharges represent a powerful tool for surface processing due to the strong chemical reactivity of plasma radicals. Therefore, characterizing these discharges by applying non-perturbing, in situ measurement techniques is of vital importance.
DOI
10.25777/nk0d-t033
ISBN
9781303528897
Recommended Citation
Nikolic, Milka.
"Characterization of Microwave Discharge Plasmas for Surface Processing"
(2013). Doctor of Philosophy (PhD), Dissertation, Physics, Old Dominion University, DOI: 10.25777/nk0d-t033
https://digitalcommons.odu.edu/physics_etds/69