Document Type
Article
Publication Date
2014
DOI
10.1103/PhysRevSTAB.17.122001
Publication Title
Physical Review Special Topics-Accelerators and Beams
Volume
17
Issue
12
Pages
122001 (1-5)
Abstract
Plasma-based surface modification of niobium is a promising alternative to wet etching of superconducting radio frequency (SRF) cavities. We have demonstrated surface layer removal in an asymmetric nonplanar geometry, using a simple cylindrical cavity. The etching rate is highly correlated with the shape of the inner electrode, radio-frequency (rf) circuit elements, gas pressure, rf power, chlorine concentration in the Cl2/Ar gas mixtures, residence time of reactive species, and temperature of the cavity. Using variable radius cylindrical electrodes, large-surface ring-shaped samples, and dc bias in the external circuit, we have measured substantial average etching rates and outlined the possibility of optimizing plasma properties with respect to maximum surface processing effect.
Original Publication Citation
Upadhyay, J., Im, D., Popovic, S., Valente-Feliciano, A.M., Phillips, L., & Vuskovic, L. (2014). Plasma processing of large curved surfaces for superconducting rf cavity modification. Physical Review Special Topics-Accelerators and Beams, 17(12), 122001 . doi: 10.1103/PhysRevSTAB.17.122001
ORCID
0000-0002-3668-4841 (Popovic), 0000-0002-7202-7283 (Vuskovic)
Repository Citation
Upadhyay, J.; Im, Do; Popovic, S.; Valente-Feliciano, A. M.; Phillips, L.; and Vušković, L., "Plasma Processing of Large Curved Surfaces for Superconducting rf Cavity Modification" (2014). Physics Faculty Publications. 43.
https://digitalcommons.odu.edu/physics_fac_pubs/43