Document Type

Article

Publication Date

1998

Publication Title

Applied Physics Letters

Volume

73

Issue

7

Pages

885-887

DOI

10.1063/1.122027

Abstract

By reducing the diameter of the cathode opening in a hollow cathode discharge geometry to values on the order of 100 μm, we were able to operate these discharges in noble gases in a direct current mode up to atmospheric pressure. High-pressure discharges in xenon were found to be strong sources of excimer radiation. Highest intensities at a wavelength of 172 nm were obtained at a pressure of 400 Torr. At this pressure, the vacuum ultraviolet (VUV) radiant power of a single discharge operating at a forward voltage of 220 V and currents exceeding 2 mA reaches values between 6% and 9% of the input electrical power. The possibility to form arrays of these discharges allows the generation of flat panel VUV lamps with radiant emittances exceeding 50 W/cm2.

Comments

This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Applied Physics Letters 73 (7) 885-887 and may be found at https://doi.org/10.1063/1.122027.

Original Publication Citation

El-Habachi, A., & Schoenbach, K. H. (1998). Generation of intense excimer radiation from high-pressure hollow cathode discharges. Applied Physics Letters, 73(7), 885-887. doi:10.1063/1.122027

ORCID

0000-0001-7867-7773 (Schoenbach)

Download

Share

COinS