Document Type

Article

Publication Date

1999

Publication Title

Journal of Applied Physics

Volume

85

Issue

4

Pages

2075-2080

DOI

10.1063/1.369505

Abstract

Stabilization and control of a high-pressure glow discharge by means of a microhollow cathode discharge has been demonstrated. The microhollow cathode discharge, which is sustained between two closely spaced electrodes with openings of approximately 100 μm diam, serves as plasma cathode for the high-pressure glow. Small variations in the microhollow cathode discharge voltage generate large variations in the microhollow cathode discharge current and consequently in the glow discharge current. In this mode of operation the electrical characteristic of this system of coupled discharges resembles that of a vacuum triode. Using the microhollow cathode discharge as plasma cathode it was possible to generate stable, direct current discharges in argon up to atmospheric pressure, with estimated electron densities in the range from 1011 to 1012  cm −3. The recently demonstrated parallel operation of these discharges indicates the potential of this technique for the generation of large volume plasmas at high gas pressure through superposition of individual glow discharges.

Comments

This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Journal of Applied Physics, 85 (4), 2075-2080 and may be found at https://doi.org/10.1063/1.369505.

Original Publication Citation

Stark, R. H., & Schoenbach, K. H. (1999). Direct current high-pressure glow discharges. Journal of Applied Physics, 85(4), 2075-2080. doi:10.1063/1.369505

ORCID

0000-0001-7867-7773 (Schoenbach)

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