Document Type

Article

Publication Date

2000

Publication Title

Physics of Plasmas

Volume

7

Issue

5

Pages

2186-2191

DOI

10.1063/1.874039

Abstract

Microhollow cathode discharges are high-pressure, nonequilibrium gas discharges between a hollow cathode and a planar or hollow anode with electrode dimensions in the 100 μm range. The large concentration of high-energy electrons, in combination with the high-gas density favors excimer formation. Excimer emission was observed in xenon and argon, at wavelengths of 128 and 172 nm, respectively, and in argon fluoride and xenon chloride, at 193 and 308 nm. The radiant emittance of the excimer radiation was found to increase monotonically with pressure. However, due to the decrease in source size with pressure, the efficiency (ratio of excimer radiant power to input electrical power), has for xenon and argon fluoride a maximum at ∼400 Torr. The maximum efficiency is between 6% and 9% for xenon, and ∼2% for argon fluoride.

Comments

This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Physics of Plasmas 7 (5) 2186-2191 and may be found at https://doi.org/10.1063/1.874039.

Original Publication Citation

Schoenbach, K. H., El-Habachi, A., Moselhy, M. M., Shi, W., Stark, R. H., B., G., & U., K. (2000). Microhollow cathode discharge excimer lamps. Physics of Plasmas, 7(5), 2186-2191. doi:10.1063/1.874039

ORCID

0000-0001-7867-7773 (Schoenbach)

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