Date of Award

Spring 2010

Document Type

Thesis

Degree Name

Master of Science (MS)

Department

Electrical & Computer Engineering

Program/Concentration

Electrical Engineering

Committee Director

Hani Elsayed-Ali

Committee Member

Helmut Baumgart

Committee Member

Sacharia Albin

Call Number for Print

Special Collections LD4331.E55 B35 2010

Abstract

The ablation of indium tin oxide (ITOl thin films on glass for laser scribing is performed with nanosecond, 1064 nm pulses. ITO and ITO/Ag ablation from the coating side are compared to those from the glass side. The results show that complete coating removal with wide ablation profile is achieved at a lower fluence when the ablation is performed from the glass side. Laser scribing is used to fabricate an antenna structure from ITO and ITO/Ag thin films. For a wireless sensor application, it is often that thin film conductivity needs to be maximized. Fabrication of a multilayer ITO/Ag film is shown to increase thin film conductivity while maintaining some film transmittance.

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DOI

10.25777/jp9w-vp86

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