Date of Award

Fall 2000

Document Type

Thesis

Degree Name

Master of Science (MS)

Department

Electrical & Computer Engineering

Program/Concentration

Electrical Engineering

Committee Director

Sacharia Albin

Committee Member

Ravindra P. Joshi

Committee Member

Glenn Gerdin

Call Number for Print

Glenn Gerdin

Abstract

Field emission is a process through which the application of a large electric field to the surface of a material causes electron emission into vacuum. The electron emission current is a strong function of the geometry of the emitting material. The focus of this thesis is to investigate the effect of geometry on the emission current. Specifically, silicon field emitter arrays were fabricated using two separate fabrication processes termed the standard process and the new process. The uniformity of the arrays was measured experimentally. The arrays were used in field emission tests from which parameters controlling field emission were extracted. The results have shown that the new process gives the most uniform and consistent field emission performance.

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DOI

10.25777/z5pd-6q86

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