Date of Award

Spring 1996

Document Type

Thesis

Degree Name

Master of Science (MS)

Department

Electrical & Computer Engineering

Program/Concentration

Electrical Engineering

Committee Director

Sacharia Albin

Committee Member

Vishnu K. Lakdawala

Committee Member

Linda Vahala

Call Number for Print

Special Collections LD4331.E55 H35

Abstract

Theoretical modeling conducted previously in our Microelectronics Laboratory has shown that a layer of diamond film inserted between a metal film and a substrate will enhance the frequency response of a conventional thin film flow sensor. This thesis involved fabricating and testing a conventional thin film sensor of nickel on quartz (Ni/Q) and a diamond enhanced sensor (Ni/D/Q) for comparative frequency response analysis to validate the theory. Diamond films were grown onto quartz substrates using a microwave plasma enhanced chemical vapor deposition process. Conditions were established to synthesize continuous diamond films on quartz substrates. These films were characterized by scanning electron microscopy and Raman spectroscopy. The frequency response of the Ni/Q and Ni/D/Q sensors were measured using a constant temperature anemometer. The diamond enhanced sensor yielded a frequency response of 240 kHz compared to 100 kHz for the conventional thin film sensor, which is in agreement with the theoretically predicted results.

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DOI

10.25777/4rnj-mk05

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