Document Type
Article
Publication Date
12-2018
DOI
10.1149/2.0331811jss
Publication Title
ECS Journal of Solid State Science and Technology
Volume
7
Issue
12
Pages
Q246-Q252
Abstract
This paper reports an enhancement on the sensing performance of ZnO nanorod ethanol sensors with a new approach by utilizing nested coatings of Aluminum doped ZnO (AZO) thin films by Atomic Layer Deposition (ALD) technology. ZnO nanorods were grown by the hydrothermal method with the ZnO seed layer synthesized on Silicon wafers by ALD. To enhance the sensing performance of ZnO nanorod ethanol sensors, multiple coated AZO thin film 3-D coatings were deposited on the surface of the intrinsic ZnO nanorods by ALD.To investigate the sensing performance of the ZnO nanorods sensor for the detection of ethanol vapor, a gas sensor testing system was designed and built with a sealed reaction chamber and a temperature controller. The demonstrated sensing performance results include the sensing response comparison between ZnO nanorods before and after ALD coatings with AZO films at different temperatures and with various concentrations of input ethanol vapor. The response times and recovery times of ZnO nanorods before and after ALD coatings with AZO thin films were analyzed to investigate the sensing enhancement. The sensing response improvement peaks at 25°C room temperature with approximately 200% enhancement. However, the sensing response improvement decreases as a function of increasing operating temperature.
Original Publication Citation
Lin, P., Chen, X., Zhang, K., & Baumgart, H. (2018). Improved gas sensing performance of ALD AZO 3-D coated ZnO nanorods. ECS Journal of Solid State Science and Technology, 7(12), Q246-Q252. doi:10.1149/2.0331811jss
Repository Citation
Lin, P.; Chen, X.; Zhang, K.; and Baumgart, H., "Improved Gas Sensing Performance of ALD AZO 3-D Coated ZnO Nanorods" (2018). Electrical & Computer Engineering Faculty Publications. 200.
https://digitalcommons.odu.edu/ece_fac_pubs/200
ORCID
0000-0002-1191-4532 (Lin), 0000-0002-2557-3070 (Zhang), 0000-0001-8272-2151 (Baumbart)
Included in
Materials Science and Engineering Commons, Nanoscience and Nanotechnology Commons, Physics Commons
Comments
© The Author(s) 2018. Published by ECS. This is an open access article distributed under the terms of the Creative Commons Attribution 4.0 License, which permits unrestricted reuse of the work in any medium, provided the original work is properly cited. [DOI: 10.1149/2.0331811jss]