Document Type

Article

Publication Date

2025

DOI

10.1116/6.0004882

Publication Title

Journal of Vacuum Science & Technology B

Volume

43

Issue

6

Pages

064203 (1-13)

Abstract

A laser-driven multicharged ion beamline has been developed, incorporating electrostatic components for acceleration, beam shaping, focusing, and selection by ion charge and energy per charge. A 10 ns, 1064 nm Q-switched Nd:YAG laser, operated at a fluence of 68 J/cm², ablates a Nb target to generate a plasma from which ions are extracted and accelerated. After ion acceleration, a five-element electrostatic lens is used to reduce the beam size and collimate the ion beam, thereby maximizing ion transmission through subsequent beamline components. A 90 ° cylindrical electrostatic ion energy analyzer is used to select ions within a specific energy per charge range. Further analysis of ion energy per charge is conducted using a three-grid retarding field analyzer. Ion signals are detected via time-of-flight measurements using a Faraday cup. Ion charge selection is achieved using a pair of pulsed deflection plates. The ions are subsequently focused by two einzel lenses, one to reduce the beam size and the other to further focus the beam. Ion pulses of Nb³+ to Nb⁸+, containing approximately 10⁷ to 10⁸ ions per each ion charge, were measured at the Faraday cup location, with ion counts decreasing as the charge state increased. This ion beamline enables ion acceleration, beam shaping, and the selection of charge states and energy ranges, supporting applications such as ion deposition and implantation

Comments

Note: This paper is part of the Special Topic on the 68th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN 2025).

Rights

This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in

Islam, M. O., Mojumder, M. F., Mahmood, R., & Elsayed-Ali, H. E. (2025). Development of a niobium multicharged ion beamline. Journal of Vacuum Science & Technology B, 43(6), 1-13, Article 064203.

and may be found at https://doi.org/10.1116/6.0004882

Data Availability

Article states: "The data that support the findings of this study are available from the corresponding author upon reasonable request."

Original Publication Citation

Islam, M. O., Mojumder, M. F., Mahmood, R., & Elsayed-Ali, H. E. (2025). Development of a niobium multicharged ion beamline. Journal of Vacuum Science & Technology, 43(6), 1-13, Article 064203. https://doi.org/10.1116/6.0004882

ORCID

0000-0003-1313-4617 (Islam), 0009-0000-6216-3671 (Mojumder), 0009-0006-1832-163X (Mahmood), 0000-0002-1329-5018 (Elsayed-Ali)

Available for download on Thursday, December 24, 2026

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