Nb₃Sn Coating of SRF Cavity by Cosputtering from a Composite Target

Authors

• Md Sharifuzzaman Shakel, Old Dominion UniversityFollow
• Grigory V. Eremeev, Fermi National Accelerator Laboratory
• Anne-Marie Valente-Feliciano, Thomas Jefferson National Accelerator Facility
• Uttar Pudasaini, Thomas Jefferson National Accelerator Facility
• Hani E. Elsayed-Ali, Old Dominion UniversityFollow

Document Type

Article

Publication Date

2026

DOI

10.1116/6.0005369

Publication Title

Journal of Vacuum Science & Technology A

Volume

44

Issue

3

Pages

033407

Abstract

We deposited an Nb₃Sn film on the inner surface of a 2.6 GHz Nb superconducting radio frequency cavity by cosputtering using a composite of Nb and Sn tube targets in a DC cylindrical magnetron sputtering system, followed by the thermal annealing of the coated cavity. An aluminum mockup cavity, replicating a 2.6 GHz Nb SRF cavity geometry, was utilized to optimize deposition parameters, resulting in cosputtered Nb-Sn films with an Sn content of 32-42 at. % on the beam tubes and equator positions. Several annealing conditions were investigated to improve the surface homogeneity of the Nb3Sn film. The best cosputtered Nb-Sn film was achieved after annealing at 600 degrees C for 6 h, followed by annealing at 950 degrees C for 1 h. The best process was applied to a Nb cavity, which was RF tested in a cryogenic dewar. RF testing of the Nb₃Sn-coated cavity demonstrated a superconducting transition temperature of 17.78 K. The Nb₃Sn cavity underwent light Sn recoating, followed by additional RF testing, resulting in the enhancement of the RF performance, primarily due to the improved surface homogeneity of the Nb₃Sn coating.

Rights

© 2026 AIP Publishing LLC

This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in

Shakel, M. S., Eremeev, G. V., Valente-Feliciano, A. M., Pudasaini, U., & Elsayed-Ali, H. E. (2026). Nb₃Sn coating of SRF cavity by cosputtering from a composite target. Journal of Vacuum Science & Technology A, 44(3), 1-15, Article 033407.

and may be found at https://doi.org/10.1116/6.0005369.

Original Publication Citation

Shakel, M. S., Eremeev, G. V., Valente-Feliciano, A. M., Pudasaini, U., & Elsayed-Ali, H. E. (2026). Nb₃Sn coating of SRF cavity by cosputtering from a composite target. Journal of Vacuum Science & Technology A, 44(3), Article 033407. https://doi.org/10.1116/6.0005369

Repository Citation

Shakel, Md Sharifuzzaman; Eremeev, Grigory V.; Valente-Feliciano, Anne-Marie; Pudasaini, Uttar; and Elsayed-Ali, Hani E., "Nb₃Sn Coating of SRF Cavity by Cosputtering from a Composite Target" (2026). Electrical & Computer Engineering Faculty Publications. 598.
https://digitalcommons.odu.edu/ece_fac_pubs/598

ORCID

0009-0008-1818-2259 (Shakel), 0000-0002-1329-5018 (Elsayed-Ali)