Electronic and Structural Properties of Molybdenum Thin Films as Determined by Real Time Spectroscopic Ellipsometry

Authors

J. D. Walker
H. Khatri
V. Ranjan
Jian Li
R. W. Collins
S. Marsillac, Old Dominion UniversityFollow

Document Type

Article

Publication Date

2009

DOI

10.1063/1.3117222

Publication Title

Applied Physics Letters

Volume

94

Issue

141908

Pages

1-3

Abstract

Walker, J.D., Khatri, H., Ranjan, V., Li, J., Collins, R.W., & Marsillac, S. (2009). Electronic and structural properties of molybdenum thin films as determined by real-time spectroscopic ellipsometry. Applied Physics Letters, 94(14). doi: 10.1063/1.3117222

Original Publication Citation

Walker, J.D., Khatri, H., Ranjan, V., Li, J., Collins, R.W., & Marsillac, S. (2009). Electronic and structural properties of molybdenum thin films as determined by real-time spectroscopic ellipsometry. Applied Physics Letters, 94(141908), 1-3. doi: 10.1063/1.3117222

Repository Citation

Walker, J. D.; Khatri, H.; Ranjan, V.; Li, Jian; Collins, R. W.; and Marsillac, S., "Electronic and Structural Properties of Molybdenum Thin Films as Determined by Real Time Spectroscopic Ellipsometry" (2009). Electrical & Computer Engineering Faculty Publications. 8.
https://digitalcommons.odu.edu/ece_fac_pubs/8