Date of Award

Spring 2012

Document Type

Thesis

Degree Name

Master of Science (MS)

Department

Mechanical & Aerospace Engineering

Program/Concentration

Mechanical Engineering

Committee Director

Zhili Julie Hao

Committee Member

Han Bao

Committee Member

Colin P. Britcher

Abstract

This thesis presents a z-axis MEMS gyroscope with a symmetric mechanical structure. The multiple-mass design prioritizes the sense-mode Quality Factor (Q) and thus improves its scale factor. The proposed mechanically coupled, dynamically balanced anti-phase sense-mode design minimizes energy dissipation through the substrate in order to maximize the Q. Numerical simulation is implemented in a finite element analysis software, COMSOL, to identify the two operation modes of the gyroscope: drive-mode and sense-mode. The multiple-mass gyroscope design is further fabricated using a one-mask process. Experimental characterization of frequency response in both drive-mode and sense-mode of the device are conducted, proving the design concept for improving the Q in the sense-mode.

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DOI

10.25777/f5vj-gk54

ISBN

9781267647689

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