Document Type

Article

Publication Date

2003

Publication Title

Applied Physics Letters

Volume

83

Issue

23

Pages

4728-4730

DOI

10.1063/1.1632034

Abstract

We report on argon excimer emission from high-pressure microdischarges formed inside metal capillaries with or without gas flow. Excimer emission intensity from a single tube increases linearly with gas pressure between 400 and 1000 Torr. Higher discharge current also results in initial intensity gains until gas heating causes saturation or intensity drop. Argon flow through the discharge intensifies emission perhaps by gas cooling. Emission intensity was found to be additive in prealigned dual microdischarges, suggesting that an array of microdischarges could produce a high-intensity excimer source.

Comments

This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Applied Physics Letters 83 (23) 4728-4730, and may be found at https://doi.org/10.1063/1.1632034.

Original Publication Citation

Sankaran, R. M., Giapis, K. P., Moselhy, M., & Schoenbach, K. H. (2003). Argon excimer emission from high-pressure microdischarges in metal capillaries. Applied Physics Letters, 83(23), 4728-4730. doi:10.1063/1.1632034

ORCID

0000-0001-7867-7773 (Schoenbach)

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