Document Type

Article

Publication Date

2000

Publication Title

Journal of Applied Physics

Volume

88

Issue

6

Pages

3220-3224

DOI

10.1063/1.1288699

Abstract

Stable, direct current microhollow cathode discharges in mixtures of hydrochloric acid, hydrogen, xenon, and neon have been generated in a pressure range of 200–1150 Torr. The cathode hole diameter was 250 μm. Sustaining voltages range from 180 to 250 V at current levels of up to 5 mA. The discharges are strong sources of xenon chloride excimer emission at a wavelength of 308 nm. Internal efficiencies of approximately 3% have been reached at a pressure of 1050 Torr. The spectral radiant power at this pressure was measured as 5 mW/nm at 308 nm for a 3 mA discharge. By using a sandwich electrode configuration, consisting of five perforated, alternate layers of metal and dielectric, a tandem discharge—two discharges in series—could be generated. For an anode–cathode–anode configuration the excimer irradiance, recorded on the axis of the discharge, was twice as large as that of a single discharge. The extension of this basic tandem electrode structure to a multiple electrode configuration allows the generation of high irradiance excimer sources. Placing such a structure with a string of microhollow cathode discharge into an optical resonator promises to lead to a direct current microexcimer laser.

Comments

This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Journal of Applied Physics 88 (6) 3220-3224 and may be found at https://doi.org/10.1063/1.1288699.

Original Publication Citation

El-Habachi, A., Shi, W., Moselhy, M., Stark, R. H., & Schoenbach, K. H. (2000). Series operation of direct current xenon chloride excimer sources. Journal of Applied Physics, 88(6), 3220-3224. doi:10.1063/1.1288699

ORCID

0000-0001-7867-7773 (Schoenbach)

Download

Share

COinS