Document Type

Article

Publication Date

1990

Publication Title

Journal of Applied Physics

Volume

67

Issue

1

Pages

154-162

DOI

10.1063/1.345294

Abstract

A model for an abnormal glow discharge, including a self‐consistent analysis of the cathode fall, was developed. It combines microscopic particle simulation by means of Monte Carlo methods with a fluid model of the gas discharge. The model allows calculations of the steady‐state electrical field distribution, the charged‐particle densities, and the current densities along the axis of the discharge. The model was used to simulate a glow discharge in 80% He and 20% SF6 at a pressure of 8 Torr with a current density of 1 A/cm2. The computed discharge voltage agrees well with measured values. The computer code can easily be modified to describe the charged‐particle densities and energies not only in the cathode fall region, but in any plasma boundary layer

Comments

This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Journal of Applied Physics 67 (1) 154-162 and may be found at https://doi.org/10.1063/1.345294.

Original Publication Citation

Schoenbach, K. H., Chen, H., & Schaefer, G. (1990). A model of DC glow discharges with abnormal cathode fall. Journal of Applied Physics, 67(1), 154-162. doi:10.1063/1.345294

ORCID

0000-0001-7867-7773 (Schoenbach)

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