Document Type

Conference Paper

Publication Date

1995

Publication Title

Proceedings of the Applied Diamond Conference 1995- Applications of Diamond Films and Related Materials: Third International Conference

Pages

113-120

Conference Name

Applications of Diamond Films and Related Materials: Third International Conference, National Institute of Standards and Technology, Gaithersburg, MD, August 21-24, 1995

Abstract

We present the results of theoretical modeling and experimental testing of a diamond thin film sensor for flow studies. It is shown that the high thermal conductivity of a diamond film can enhance the frequency response of the flow sensor. One-dimensional heat diffusion equation was solved using the finite difference method for determining the frequency response. Two different sensor structures were analyzed: a Ni film on a quartz substrate (Ni/Q) and an intermediate layer of diamond film between the Ni film and quartz substrate (Ni/D/Q). The theoretical model predicts a frequency response for the Ni/D/Q sensor higher than that of the Ni/Q sensor. Diamond films for the Ni/D/Q sensor were deposited onto the quartz substrate by microwave plasma-enhanced chemical vapor deposition (MPECVD). The conditions for a high nucleation density were established for obtaining a continuous diamond thin film. A subsequent nickel film patterned and deposited serves as the sensing arm in the bridge circuit of an anemometer. The measured frequency response of the Ni/D/Q sensor combination is greater than 220 kHz, as compared to the Ni/Quartz sensor response of 120 kHz.

Comments

This work is in the public domain.

Original Publication Citation

Albin, S., Hagwood, J. C., Cooper, J. B., Gray, D. L., Martinson, S. D., & Scott, M. A. (1995). A Diamond Thin Film Flow Sensor. Paper presented at the Applications of Diamond Films and Related Materials: Third International Conference, National Institute of Standards and Technology, Gaithersburg, Maryland, August 21-24.

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