Cylindrical Magnetron Development for Nb₃sn Deposition via Magnetron Sputtering

Authors

Md. Nizam Sayeed, Old Dominion UniversityFollow
Hani Elsayed-Ali, Old Dominion UniversityFollow
C. Côté
M. A. Farzad
A. Sarkissian
G. V. Eremeev
A-M. Valente-Feliciano

Document Type

Conference Paper

Publication Date

2021

Publication Title

Proceedings of SRF2021

Pages

3 pp.

Conference Name

2021 International Conference on RF Superconductivity (SRF 2021), June 28-July 02, 2021, East Lansing, Michigan (Virtual)

Abstract

Due to its better superconducting properties (critical temperature Tc~ 18.3 K, superheating field H_sh~ 400 mT), Nb₃Sn is considered as a potential alternative to niobium (Tc~ 9.25 K, H_sh~ 200 mT) for superconducting radiofrequency (SRF) cavities for particle acceleration. Magnetron sputtering is an effective method to produce superconducting Nb₃Sn films. We deposited superconducting Nb₃Sn films on samples with magnetron sputtering using co-sputtering, sequential sputtering, and sputtering from a stoichiometric target. Nb₃Sn films produced by magnetron sputtering in our previous experiments have achieved DC superconducting critical temperature up to 17.93 K and RF superconducting transition at 17.2 K. A magnetron sputtering system with two identical cylindrical cathodes that can be used to sputter Nb₃Sn films on cavities has been designed and is under development now. We report on the design and the current progress on the development of the system.

Comments

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Original Publication Citation

Sayeed, M.N., Elsayed-Ali, H., Côté, C., Farzad, M.A., Sarkissian, A., Eremeev, G.V., & Valente-Feliciano, A.M. (2021). Cylindrical magnetron development for Nb₃sn deposition via magnetron sputtering. 2021 International Conference on RF Superconductivity (SRF 2021), East Lansing, Michigan (Virtual). https://srf2021.vrws.de/papers/thptev015.pdf

Repository Citation

Sayeed, Md. Nizam; Elsayed-Ali, Hani; Côté, C.; Farzad, M. A.; Sarkissian, A.; Eremeev, G. V.; and Valente-Feliciano, A-M., "Cylindrical Magnetron Development for Nb₃sn Deposition via Magnetron Sputtering" (2021). Electrical & Computer Engineering Faculty Publications. 315.
https://digitalcommons.odu.edu/ece_fac_pubs/315