Document Type

Conference Paper

Publication Date


Publication Title

Proceedings of SRF2021


3 pp.

Conference Name

2021 International Conference on RF Superconductivity (SRF 2021), June 28-July 02, 2021, East Lansing, Michigan (Virtual)


Due to its better superconducting properties (critical temperature Tc~ 18.3 K, superheating field Hsh~ 400 mT), Nb3Sn is considered as a potential alternative to niobium (Tc~ 9.25 K, Hsh~ 200 mT) for superconducting radiofrequency (SRF) cavities for particle acceleration. Magnetron sputtering is an effective method to produce superconducting Nb3Sn films. We deposited superconducting Nb3Sn films on samples with magnetron sputtering using co-sputtering, sequential sputtering, and sputtering from a stoichiometric target. Nb3Sn films produced by magnetron sputtering in our previous experiments have achieved DC superconducting critical temperature up to 17.93 K and RF superconducting transition at 17.2 K. A magnetron sputtering system with two identical cylindrical cathodes that can be used to sputter Nb3Sn films on cavities has been designed and is under development now. We report on the design and the current progress on the development of the system.


Content from this work may be used under the terms of the Creative Commons Attribution 3.0 Unported license.

Original Publication Citation

Sayeed, M.N., Elsayed-Ali, H., Côté, C., Farzad, M.A., Sarkissian, A., Eremeev, G.V., & Valente-Feliciano, A.M. (2021). Cylindrical magnetron development for Nb₃sn deposition via magnetron sputtering. 2021 International Conference on RF Superconductivity (SRF 2021), East Lansing, Michigan (Virtual).

Elsayed-Poster.pdf (1006 kB)
Conference Poster- Cylindrical Magnetron Development